Magnetrons

Sputtering sources for thin-film coatings.

Magneto Series Magnetrons

Magneto Series magnetron sources are designed for depositing high-quality metal, semiconductor, and dielectric coatings. Magneto Series magnetrons allow adjustment of their orientation and position inside the vacuum chamber through a sliding vacuum seal and an optional tiltable cathode assembly. Magnetron sputtering systems of this series are ideal for R&D departments and scientific laboratories due to their flexible settings and ease of operation.

MagFix

Compact magnetron with rapid target replacement for thin-film deposition in research and industrial systems. The magnetic mounting system enables rapid replacement of the target together with its backing plate. The removable assembly is taken out as a complete unit and replaced with another assembly with a pre-mounted target. This design simplifies switching between materials during experiments and process development. MagFix is designed for operation with direct-current (DC), medium-frequency (MF), radio-frequency (RF), and pulsed power supplies, including HiPIMS, MPPS, and DOMS modes.