Magnetrons
Sputtering sources for thin-film coatings.
Magneto Series Magnetrons
Magneto Series magnetron sources are designed for depositing high-quality metal, semiconductor, and dielectric coatings. Magneto Series magnetrons allow adjustment of their orientation and position inside the vacuum chamber through a sliding vacuum seal and an optional tiltable cathode assembly. Magnetron sputtering systems of this series are ideal for R&D departments and scientific laboratories due to their flexible settings and ease of operation.
- Диаметр катода2"–6"
- Режимы питанияDC / MF / RF / HiPIMS
- ОхлаждениеВодяное
- Регулировка положенияСкользящее уплотнение, наклон катода (опция)
Grinch Series Magnetrons
Grinch series magnetron sources are designed for the deposition of high-quality metal, semiconductor, and dielectric coatings. Magnetrons of this series are fixed in position on the mounting flange and do not occupy valuable space inside the vacuum chamber, making them ideal for use in small systems.
- Диаметр катода2"–4"
- Режимы питанияDC / MF / RF
- ОхлаждениеВодяное
- МонтажФиксированный на посадочном фланце