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MagFix

Compact magnetron with rapid target replacement for thin-film deposition in research and industrial systems. The magnetic mounting system enables rapid replacement of the target together with its backing plate. The removable assembly is taken out as a complete unit and replaced with another assembly with a pre-mounted target. This design simplifies switching between materials during experiments and process development. MagFix is designed for operation with direct-current (DC), medium-frequency (MF), radio-frequency (RF), and pulsed power supplies, including HiPIMS, MPPS, and DOMS modes.

Specifications

Target diameter76.2 mm (3″) or 101.6 mm (4″)
CoolingIndirect
Gas inletNo gas inlet or distributed gas inlet
Cathode tiltNo tilt, flange-type or bellows-type
ShutterNo shutter, mechanical, pneumatic or electric
Mounting flangeISO 100, ISO 160, ISO 200 or custom
Vacuum configurationUHV