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MagFix
Compact magnetron with rapid target replacement for thin-film deposition in research and industrial systems. The magnetic mounting system enables rapid replacement of the target together with its backing plate. The removable assembly is taken out as a complete unit and replaced with another assembly with a pre-mounted target. This design simplifies switching between materials during experiments and process development. MagFix is designed for operation with direct-current (DC), medium-frequency (MF), radio-frequency (RF), and pulsed power supplies, including HiPIMS, MPPS, and DOMS modes.
Specifications
| Target diameter | 76.2 mm (3″) or 101.6 mm (4″) |
| Cooling | Indirect |
| Gas inlet | No gas inlet or distributed gas inlet |
| Cathode tilt | No tilt, flange-type or bellows-type |
| Shutter | No shutter, mechanical, pneumatic or electric |
| Mounting flange | ISO 100, ISO 160, ISO 200 or custom |
| Vacuum configuration | UHV |
