
Magneto Series Magnetrons
Magneto Series magnetron sources are designed for depositing high-quality metal, semiconductor, and dielectric coatings. Magneto Series magnetrons allow adjustment of their orientation and position inside the vacuum chamber through a sliding vacuum seal and an optional tiltable cathode assembly. Magnetron sputtering systems of this series are ideal for R&D departments and scientific laboratories due to their flexible settings and ease of operation.
Specifications
| Диаметр катода | 2"–6" |
| Режимы питания | DC / MF / RF / HiPIMS |
| Охлаждение | Водяное |
| Регулировка положения | Скользящее уплотнение, наклон катода (опция) |