Back to Magnetrons

Magneto Series Magnetrons
Magneto Series magnetron sources are designed for depositing high-quality metal, semiconductor, and dielectric coatings. Magneto Series magnetrons allow adjustment of their orientation and position inside the vacuum chamber through a sliding vacuum seal and an optional tiltable cathode assembly. Magnetron sputtering systems of this series are ideal for R&D departments and scientific laboratories due to their flexible settings and ease of operation.
Specifications
| Cathode diameter | 2"–6" |
| Power modes | DC / MF / RF / HiPIMS |
| Cooling | Water-cooled |
| Position adjustment | Sliding seal, cathode tilt (optional) |