Magneto Series Magnetrons

Magneto Series magnetron sources are designed for depositing high-quality metal, semiconductor, and dielectric coatings. Magneto Series magnetrons allow adjustment of their orientation and position inside the vacuum chamber through a sliding vacuum seal and an optional tiltable cathode assembly. Magnetron sputtering systems of this series are ideal for R&D departments and scientific laboratories due to their flexible settings and ease of operation.

Specifications

Диаметр катода2"–6"
Режимы питанияDC / MF / RF / HiPIMS
ОхлаждениеВодяное
Регулировка положенияСкользящее уплотнение, наклон катода (опция)