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Magneto Series Magnetrons

Magneto Series magnetron sources are designed for depositing high-quality metal, semiconductor, and dielectric coatings. Magneto Series magnetrons allow adjustment of their orientation and position inside the vacuum chamber through a sliding vacuum seal and an optional tiltable cathode assembly. Magnetron sputtering systems of this series are ideal for R&D departments and scientific laboratories due to their flexible settings and ease of operation.

Specifications

Cathode diameter2"–6"
Power modesDC / MF / RF / HiPIMS
CoolingWater-cooled
Position adjustmentSliding seal, cathode tilt (optional)