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Grinch Magnetron
Grinch is a flange-mounted magnetron sputtering source for thin-film deposition. The magnetron is integrated into an ISO flange and mounts directly onto the corresponding vacuum chamber port. This design allows the magnetron to be installed in compact vacuum chambers. An efficient cooling system enables operation at high input power and allows high deposition rates to be achieved. Grinch is intended for applications where affordability and ease of installation are key requirements. Grinch is designed for operation with direct-current (DC), medium-frequency (MF), and pulsed power supplies, including HiPIMS, MPPS, and DOMS modes.