Grinch Series Magnetrons

Grinch series magnetron sources are designed for the deposition of high-quality metal, semiconductor, and dielectric coatings. Magnetrons of this series are fixed in position on the mounting flange and do not occupy valuable space inside the vacuum chamber, making them ideal for use in small systems.

Specifications

Диаметр катода2"–4"
Режимы питанияDC / MF / RF
ОхлаждениеВодяное
МонтажФиксированный на посадочном фланце