Specialized systems

Sub Series Heating Stages

Sub Series stages are designed for mounting samples inside the vacuum chamber of coating deposition or ion etching/surface modification systems. The base model of the stage can be equipped with a planetary rotation system with adjustable speed, a contactless heater that allows samples to be heated up to 1200 °C, and an indirect sample cooling system. The wide range of available options makes the Sub Series suitable for research laboratories, pilot production facilities, and R&D departments.